Laser-induced chemical vapor deposition of high-purity metals

Abstract

The laser chemical vapor deposition (LCVD) of aluminum and gold has been achieved via pyrolytic decomposition of trimethylamine aluminum hydride and dimethylgold (β-diketonates), respectively. The rates of metal deposition, the purity of the deposited metals and the electrical properties of the deposits are a direct result of the chemical and physical properties of the precursor and the metal. © 1990 SPIE.