Conference paper
Carbon nanotube transistors and logic circuits
Ph. Avouris, R. Martel, et al.
Physica B: Condensed Matter
We report on in situ detection of diatomic products of plasma sputtering and reactive ion etching using the technique of laser-induced fluorescence. The diatomic molecules SiN, SiO, and SiF are observed in the gas phase when a silicon surface is subjected to ion bombardment in plasmas containing N 2, O2, and CF4, respectively. Information about the production mechanisms is obtained from the measured product concentrations under varying plasma conditions.
Ph. Avouris, R. Martel, et al.
Physica B: Condensed Matter
J. Appenzeller, J. Knoch, et al.
Device Research Conference 2003
Ph. Avouris, D.S. Bethune, et al.
Journal of Photochemistry
R. Martel, V. Derycke, et al.
DAC 2002