Conference paper
Progress in photoemission sampling
H. Beha, R. Clauberg, et al.
CompEuro 1989
The development of VLSI circuits calls for special design techniques and failure analysis. A laser-beam based contactless photoemission test method was developed for high-sensitivity voltage measurements of very fast signals at interior lines and junctions of such circuits. Features of the method are pointed out.
H. Beha, R. Clauberg, et al.
CompEuro 1989
H. Beha
IEEE Journal of Solid-State Circuits
W.H. Henkels, L.M. Geppert, et al.
Journal of Applied Physics
R. Clauberg, A. Blacha, et al.
Advances in Semiconductors and Semiconductor Structures 1987