N. Blanc, P. Guéret, et al.
ESSDERC 1991
Negative refractive index changes of up to 1.7 ×10-3 have been induced by 248 nm excimer laser light in planar germanium-free SiON waveguides. Highly temperature-stable 4OdB Bragg gratings with a length of 8mm have been written. A novel mechanism of photosensitisation was used to create the high-index changes.
N. Blanc, P. Guéret, et al.
ESSDERC 1991
H. Rothuizen, M. Despont, et al.
MEMS 2009
R. Germann, R. Beyeler, et al.
OFC 1999
A.W. Knoll, P. Bächtold, et al.
Microelectronic Engineering