Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Epitaxial pseudomorphic films of Cu have been grown on Pt{001} to thicknesses of 1517 layers. A quantitative low-energy electron-diffraction intensity analysis of a ten-layer film reveals that the in-plane lattice constant is that of the Pt{001}1×1 net (a0=3.93), and that the bulk interlayer spacing is 1.620.04. Strain analysis shows that this structure is derived from the fcc structure of Cu with a plane strain of about 9%, similar to Cu films grown on Pd{001}. © 1991 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Sang-Min Park, Mark P. Stoykovich, et al.
Advanced Materials
R.M. Macfarlane, R.L. Cone
Physical Review B - CMMP
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Macromolecules