Investigations of silicon nano-crystal floating gate memories
Arvind Kumar, Jeffrey J. Welser, et al.
MRS Spring 2000
Kerf-less removal of surface layers of photovoltaic materials including silicon, germanium, and III-Vs is demonstrated by controlled spalling technology. The method is extremely simple, versatile, and applicable to a wide range of substrates. Controlled spalling technology requires a stressor layer, such as Ni, to be deposited on the surface of a brittle material, and the controlled removal of a continuous surface layer could be performed at a predetermined depth by manipulating the thickness and stress of the Ni layer. Because the entire process is at room temperature, this technique can be applied to kerf-free ingot dicing, removal of preformed p-n junctions or epitaxial layers, or even completed devices. We successfully demonstrate kerf-free ingot dicing, as well as the removal of III-V single-junction epitaxial layers from a Ge substrate. Solar cells formed on the spalled and transferred single-junction layers showed similar characteristics to nonspalled (bulk) cells, indicating that the quality of the epitaxial layers is not compromised as a result of spalling. © 2011 IEEE.
Arvind Kumar, Jeffrey J. Welser, et al.
MRS Spring 2000
M.A. Lutz, R.M. Feenstra, et al.
Surface Science
Surendra B. Anantharaman, Joachim Kohlbrecher, et al.
MRS Fall Meeting 2020
K.A. Chao
Physical Review B