A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics
Thin films of carbon have been deposited at temperatures ranging from 77 to 1073 K. It has been found that diamond-like properties of the films change with the deposition temperature and the thermal conductivity of the substrate. Densities as high as 2.9 g/cc with an sp3bond content > 40% have been observed. Substrates that have been investigated include graphite, NaCl, Si, Al2O3fused quartz, and diamond. Density measurements have been made using Rutherford backscattering spectrometry and electron-energy-loss spectroscopy while hydrogen profiling was conducted using forward recoil spectrometry. © 1991, American Vacuum Society. All rights reserved.
A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics
Thomas H. Baum, Carl E. Larson, et al.
Journal of Organometallic Chemistry
Hiroshi Ito, Reinhold Schwalm
JES
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films