Integrated optical waveguide modulators in silicon

Abstract

Silicon-based optoelectronic systems have the potential to achieve high densities of integration while allowing the incorporation of silicon electronics, silicon optical components1 and detectors2,3,4. We have developed silicon electroabsorption modulators and Mach-Zehnder waveguide interferometers that exhibit response times of less than 50 ns and modulation depths of -6.2 dB at λ=1.3 μm. © 1991 Optical Society of America