Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We report the observation of the room-temperature infrared absorption spectrum of sputtered films of amorphous Si and Ge between 35 and 700 cm-1. The spectra show a broad frequency range of absorption corresponding to the frequency range of the vibrational density of states in crystalline Si and Ge. We interpret the results in terms of a disorder-induced breakdown of the selection rules for vibronic infrared absorption in much the same way as occurs in Raman scattering. Discussion is given of related phenomena in alloys and neutron-irradiated crystals. © 1974 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
D.D. Awschalom, J.-M. Halbout
Journal of Magnetism and Magnetic Materials
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
John G. Long, Peter C. Searson, et al.
JES