J.W. Coburn, W.W. Harrison
Applied Spectroscopy Reviews
Paper
Influence of the altered layer on depth profiling measurements
Abstract
A simple phenomenological theory of alloy sputtering is developed which suggests that in some instances the depth resolution of depth profiling measurements is limited by the time it takes to create a layer of altered chemical composition at the surface.
Related
J.W. Coburn
Review of Scientific Instruments
J.W. Coburn, E. Taglauer, et al.
Japanese Journal of Applied Physics
K. Kehler, J.W. Coburn, et al.
JVSTA