E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
We present x-ray photoemission results for a series of NbNx films with 0.0 x 0.2. Core and valence-band spectra show that charge is transferred from the pure metallic band to hybrid N-Nb states centered 6 eV below the Fermi edge. The x dependencies of the Fermi-level density of states nexpt(EF) and core-level-asymmetry parameters are compared to those of the superconducting transition temperature Tc and lattice constants obtained for similar samples by other workers. In particular, Tc decreases with nexpt(EF) for x<xc 0.1 after which both Tc and nexpt(EF) remain constant within experimental uncertainty. We suggest that for x>xc the metal valence electrons are not able to screen additional N impurities. The behavior of the Nb core-level widths, which measures static valence charge-density fluctuations, supports this conclusion. © 1981 The American Physical Society.
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990
Sharee J. McNab, Richard J. Blaikie
Materials Research Society Symposium - Proceedings
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009