Influence of detection conditions on near-field optical imaging

Abstract

The process of image formation in transmission mode scanning near-field optical microscopy is analyzed both theoretically and experimentally. Changes in the dielectric and topographic properties of the sample influence not only the total transmitted intensity, but also its angular distribution in the far field. This opens up an additional source of optical information about the sample. Some of this additional information is retrieved by separate but simultaneous detection of the radiation emitted at angles smaller (allowed light) and larger (forbidden light) man the critical angle of total internal reflection, respectively. Different experimental setups and their respective advantages are discussed. High resolution, constant height mode optical images of test structures are compared with theoretical predictions. Forbidden-light optical images frequently provide enhanced resolution and/or contrast as compared to allowed light images. For small phase objects, in contrast to amplitude objects, a contrast reversal between forbidden and allowed light images is observed. © 1998 American Institute of Physics.