K. Kehler, J.W. Coburn, et al.
JVSTA
No abstract available.
K. Kehler, J.W. Coburn, et al.
JVSTA
F. Parmigiani, E. Kay, et al.
Applied Optics
E. Kay, A. Dilks, et al.
Journal of Macromolecular Science: Part A - Chemistry
E. Kay, F. Parmigiani, et al.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films