R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids
An energy analyser is described for measuring the energy of the secondary electrons in the scanning electron microscope. It consists of a 63°deflection cylindrical analyser followed by an electron collimator. This is simpler than a mirror design reported previously and gives a higher transmission factor and less defocusing of the electron beam of the microscope. This analyser has been applied to measure point-to-point variations in surface potential with an accuracy to ±1 V.
R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids
T. Schneider, E. Stoll
Physical Review B
K.N. Tu
Materials Science and Engineering: A
M. Hargrove, S.W. Crowder, et al.
IEDM 1998