J. Tersoff
Applied Surface Science
It has been demonstrated that atomic force microscopy imaging with CO-functionalized tips provides unprecedented resolution, yet it is subject to strong image distortions. Here we propose a method to correct for these distortions. The lateral force acting on the tip apex is calculated from three-dimensional maps of the frequency shift signal. Assuming a linear relationship between lateral distortion and force, atomic force microscopy images could be deskewed for different substrate systems. © 2014 American Physical Society.
J. Tersoff
Applied Surface Science
Zelek S. Herman, Robert F. Kirchner, et al.
Inorganic Chemistry
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007