T.F. Kuech, E. Veuhoff, et al.
Journal of Crystal Growth
T.F. Kuech, E. Veuhoff, et al.
Journal of Crystal Growth
Stefan Zollner, R.T. Collins, et al.
SPIE Semiconductors 1992
S. Tiwari, H.I. Hanafi, et al.
DRC 1994
R. Schulz, M. Jost, et al.
VLSI Technology 1989