Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A technique to prepare micropatterned poly(dimethylsiloxane) (PDMS) stamps with a hydrophilic surface was demonstrated. The technique used stamps cured on and released from a patterned mold to print molecules from an ink onto a substrate. Printing of polar complexes onto a substrate allowed selective electroless deposition (ELD) of a metal. The O2 plasma treated stamps remained stable under ultra high vacuum (UHV) conditions to carry out reproducible X-ray photoelectron spectroscopy (XPS) experiments.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Biancun Xie, Madhavan Swaminathan, et al.
EMC 2011
P.C. Pattnaik, D.M. Newns
Physical Review B
Mark W. Dowley
Solid State Communications