Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The solution of separable closed queueing networks requires the evaluation of homogeneous multinomial expressions. The number of terms in those expressions grows combinatorially with the size of the network such that a direct summation may become impractical. An algorithm is given which does not show a combinatorial operation count. The algorithm is based on a generalization of Horner's rule for polynomials. It is also shown how mean queue size and throughput can be obtained at negligible extra cost once the normalization constant is evaluated. © 1975, ACM. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989
Robert C. Durbeck
IEEE TACON
Matthias Kaiserswerth
IEEE/ACM Transactions on Networking