Sholom M. Weiss, Amit Dhurandhar, et al.
KDD 2013
Optically stimulated electron emission (OSEE) measurements may be used to monitor a variety of surface properties. To take full advantage of the potential of such measurements, well-defined reference surfaces are required to serve as calibration standards and for use in comparative studies. Here we describe the use of freshly cleaved highly oriented pyrolytic graphite as a reference surface. With the most elementary protocol of peeling the surface with adhesive tape, surfaces with OSEE currents varying by ±3.5% may be produced. By taking into account sample thickness changes with repeated use, variations should be reduced to on the order of ±1% routinely.
Sholom M. Weiss, Amit Dhurandhar, et al.
KDD 2013
Robert J. Baseman, Fateh A. Tipu, et al.
SPIE Advanced Lithography 2021
J. Samuel Batchelder
Proceedings of SPIE 1989
Igor Y. Khandros, Robert J. Baseman, et al.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films