High voltage sweep and controlled magnetic lens current supplies for the electron microprobe

Abstract

Three electronic systems have been developed for the electron probe x-ray microanalyzer to provide (1) automatic sweep of the electron beam high voltage, (2) automatic control of the target current as the electron beam voltage is varied, and (3) automatic control of the electron beam focus as the beam voltage is varied. In addition to conventional applications in quantitative electron probe microanalysis, special applications of these components include measurement of absorption coefficients for soft x rays, voltage dependence of cathodoluminescence in semi-conductors and insulators, three dimensional microanalysis, and ditital computer control of the microprobe analyzer. © 1972 The American Institute of Physics.