Zhen Zhang, Shi Li Zhang, et al.
Applied Physics Letters
Schottky source/drain (S/D) MOSFETs hold the promise for low series resistance and extremely abrupt junctions, providing a path for device scaling in conjunction with a low Schottky barrier height (SBH). A S/D junction SBH approaching zero is also needed to achieve a competitive current drive. In this letter, we demonstrate a CMOS process flow that accomplishes a reduction of the S/D SBH for nFET and pFET simultaneously using implants into a common NiPt silicide, followed by a low-temperature anneal (500°C 600 °C). These devices have high-κ/metal gate and fully depleted extremely thin SOI with sub-30-nm gate length. © 2010 IEEE.
Zhen Zhang, Shi Li Zhang, et al.
Applied Physics Letters
Qitao Hu, Si Chen, et al.
Science Advances
Jeng-Bang Yau, Joonah Yoon, et al.
BCTM 2016
Mikael Östling, Valur Gudmundsson, et al.
ICSICT 2008