Publication
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper

Growth dynamics of titanium silicide nanowires observed with low-energy electron microscopy

View publication

Abstract

Spontaneous nanowire (NW) formation in the Ti/Si(111) system was followed and found to occur during reactive epitaxy at T∼850°C. Dynamic observations show that the rate-limiting kinetic step during both growth and shrinking of the NWs is the silicide reaction at the island ends.