Conference paper
Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
A.M. Turing, in a 1941 personal communication to 1.1. Good, suggested a formula for estimating probabilities of words in text and, more generally, of species in a mixed population of various species. The formula is particularly interesting in a “small sample” situation where events of interest did not occur at all. It is remarkable that Turing’s formula can be obtained by significantly different statistical methods. © 1991 by American Sciences Press, Inc.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
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