Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Our Fortran codes for hard sphere fluids and their mixtures for the correlation functions that arise from the Percus-Yevick theory and the Verlet-Weis semi-empirical correction have proven useful during a period of nearly four decades and continue to be useful. In order to make these codes even more widely available, a brief summary is presented here and listings of these codes are given in the electronically accessible Supplementary Material to this paper.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics