F.K. LeGoues, M.C. Reuter, et al.
Physical Review Letters
We have formed compositionally abrupt interfaces in silicon-germanium (Si-Ge) and Si-SiGe heterostructure nanowires by using solid aluminum-gold alloy catalyst particles rather than the conventional liquid semiconductor-metal eutectic droplets. We demonstrated single interfaces that are defect-free and close to atomically abrupt, as well as quantum dots (i.e., Ge layers tens of atomic planes thick) embedded within Si wires. Real-time imaging of growth kinetics reveals that a low solubility of Si and Ge in the solid particle accounts for the interfacial abruptness. Solid catalysts that can form functional group IV nanowire-based structures may yield an extended range of electronic applications. Copyright 2009 by the American Association for the Advancement of Science; all rights reserved.
F.K. LeGoues, M.C. Reuter, et al.
Physical Review Letters
L. Krusin-Elbaum, C. Cabral, et al.
Applied Physics Letters
S. Kodambaka, F.M. Ross, et al.
MRS Fall Meeting 2006
K. Choi, H. Jagannathan, et al.
VLSI Technology 2009