Conference paper
Phase plates in the object plane for microlithography
M. Levenson
SPIE OE/LASE 1993
M. Levenson
SPIE OE/LASE 1993
S.H. Perlmutter, M. Levenson, et al.
Physical Review Letters
W. Zapka, M. Levenson, et al.
Optics Letters
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991