Finite element analysis of a piezoelectrically actuated slider for magnetic recording

The static and dynamic characteristics of a slider incorporating a piezoelectric bender are presented in this paper. The behavior of the slider is simulated by a finite element method which evaluates the sensitivity, stresses, natural frequencies, and mode shapes of the slider. The analysis reveals the optimal thickness ratio and the dominant bending mechanism of the bender as well as the effect of the epoxy bond used in the fabrication process. Experimental data also presented and show good agreement with the simulation results. © 1991 IEEE