Feedback enhanced thermo-electric topography sensing

Abstract

Thermo-electric sensors in micro-fabricated silicon cantilevers are used in a variety of applications that exploit their temperature-dependent conductivity. While the ease and low cost of integration makes their application attractive, their low sensing bandwidth presents a significant disadvantage. In this article we present a novel scheme for enhancing the sensitivity and bandwidth of these sensors using an external feedback. This scheme demonstrates the applicability of feedback control to shape a sensor's sensing dynamics. ©2009 IEEE.