Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Using photon-energy-dependent photoemission techniques with a diamond (111)-(1 × 1) crystal surface, we have determined critical points of energy bands at Γ and L (Γ1=-21 eV, L1=-12.8 eV, L2′=-15.2 eV, Γ15=+6.0 eV, Γ2′=+15.3 eV, L2′=+20 eV, Γ=+24 eV with respect to the top of the valence band Γ25′). Recent ab initio calculations agree with our results within 0.6 eV for the valence bands and show qualitative agreement for the empty conduction bands. The final bands are observed to be non-free-electron-like up to at least + 30 eV. © 1980 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
Shu-Jen Han, Dharmendar Reddy, et al.
ACS Nano
E. Burstein
Ferroelectrics