William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
No abstract available.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Guo-Jun Qi, Charu Aggarwal, et al.
IEEE TPAMI
Andrew Skumanich
SPIE Optics Quebec 1993
J. LaRue, C. Ting
Proceedings of SPIE 1989