A. Grill, R.B. Laibowitz, et al.
Integrated Ferroelectrics
The ArF excimer laser induced photochemistry of silane-ammonia mixtures has been studied with molecular beam sampling mass spectrometry. The observed products include disilane, trisilane, and all possible aminosilanes, SiHx(NH2)4-x, x = 0-3. These products are formed under steady-state photolysis conditions and under single-laser-pulse conditions. A mechanism for the formation of these species is proposed and quantitatively evaluated. © 1990 American Chemical Society.
A. Grill, R.B. Laibowitz, et al.
Integrated Ferroelectrics
J. Kouvetakis, M.W. McElfresh, et al.
Carbon
J.M. Jasinski
MRS Fall Meeting 1993
R.W. Dreyfus, J.M. Jasinski, et al.
Laser Focus (Littleton, Massachusetts)