T.H.P. Chang, M.G.R. Thomson, et al.
Microelectronic Engineering
The energy distributions of electron emission from a Schottky emitter have been studied at tip temperatures from 1450 to 1800 K and angular current densities from 0.1 to 240 μA/sr. We have observed broadening of the energy distribution, with increase of angular current density and decrease of tip temperature, from 0.4 to 1.32 eV resulting from electron tunneling and electron-electron interaction. Good agreement between the experimental results and predictions from Monte Carlo simulation of the emission process is observed. © 1997 American Institute of Physics.
T.H.P. Chang, M.G.R. Thomson, et al.
Microelectronic Engineering
T.H.P. Chang, M.G.R. Thomson, et al.
Microelectronic Engineering
H.S. Kim, M.L. Yu, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
T.H.P. Chang, M.G.R. Thomson, et al.
SPIE Optical Science, Engineering, and Instrumentation 1995