Micromechanics applications in data storage
L.-S. Fan, H.J. Mamin
Smart Structures and Materials 1995
A flexure-based rotary electrostatic microactuator is described. This microactuator is for application in a high track-density hard disk drive (HDD). It is fabricated using a high aspect-ratio stencil electroplating process. This paper emphasizes the practical system-level issues that affect the device design. The micro-actuator is demonstrated in a 3.5" form-factor HDD. With a servo bandwidth of 5 kHz, a one-track seek can be completed in under 0.2 ms. This batch-fabricated electro-static microactuator provides a low-cost, high-performance solution for achieving very high track-densities. © 1999 IEEE.
L.-S. Fan, H.J. Mamin
Smart Structures and Materials 1995
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INTERMAG 1999
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MEMS 1991
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