Electron microscopy of the grain structure of metal films and lines

Abstract

The demands of ULSI in the sub-micron regime require the understanding of properties and control of microstructure in a situation where one or more of the characteristic dimensions of the sample is of the same order as the grain size of the material. Grain structure, as determined by deposition conditions, sample geometry and thermal treatment during processing, remains the first-order microstructural factor governing the ptoperties. The grain structure evolves during both deposition and processing. A major practical and scientific issue is the elucidation of the conditions which will result in a stable grain structure. This happens when the forces acting on the grain boundaries are in equilibrium. © 1993.