Electrochemical Society Interface

Paper

01 Jun 1995

Electrochemical micromachining

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Abstract

This article discusses the opportunities and challenges of through-mask electrochemical micromachining.

Conference paper

Microfabrication by through-mask electrochemical micromachining

Madhav Datta

SPIE Micromachining and Microfabrication 1997

Paper

Application of Chemical and Electrochemical Micromachining in the Electronics Industry

Madhav Datta, Lubomyr T. Romankiw

JES

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Fabrication of an array of precision nozzles by through-mask electrochemical micromachining

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Electrochemical micromachining: An environmentally friendly, high speed processing technology

Madhav Datta, Derek Harris

Electrochimica Acta

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