C. Laurent, D. Mauri, et al.
Journal of Applied Physics
A large variety of granular polymer thin films can be synthetized in a capacitively coupled coplanar diode radiofrequency (r.f.) discharge system in which an argon-monomer mixture is injected at low pressure (20 mTorr). This approach offers several advantages over the other techniques, e.g. easy control of the metal content in the film from a few % up to 100%. The d.c. electrical properties of gold containing plasma polymerized tetrafluoroethylene (PPTFE) and the magnetic behavior of cobalt containing plasma polymerized propane (PPP) are reported in this paper. © 1989 Springer-Verlag.
C. Laurent, D. Mauri, et al.
Journal of Applied Physics
D. Mauri, D. Scholl, et al.
Physical Review Letters
P.B. Comita, W. Jacob, et al.
SPIE Microelectronic Processing Integration 1992
K. Kehler, J.W. Coburn, et al.
JVSTA