Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Measurements of the elastic properties of Li-doped KTaO3 by the resonance technique and by the pulse-echo method show a softening of 1/s 11 and c11, respectively, at temperatures below 120K. The strong dispersions observed between the respective measuring frequencies (300 kHz and 15 MHz) and the ultrasonic attenuation point to strain relaxation in which reorientation of Li by thermal activation is the rate-limiting process. A comparison of these data with nuclear spin relaxation and dielectric relaxation provides evidence for a condensed state at low T, and yet evidence against long-range order.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
John G. Long, Peter C. Searson, et al.
JES
J.A. Barker, D. Henderson, et al.
Molecular Physics
R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids