Effect of forming gas anneal on Al-SiO₂ internal photoemission characteristics

Abstract

Internal photoemission characteristics from the Al-SiO2 interface are markedly affected by a 400 °C 20 min forming gas (90% N 2 and 10% H2) anneal. The barrier height is raised by about 0.25 eV and the electric field dependence of the photocurrent is increased.