Effect of annealing on the Cu distribution and Al₂Cu precipitation in Al(Cu) thin films

Abstract

The Cu distribution in Al(Cu) thin films has been examined in blanked and patterned samples as a function of annealing. The Cu concentration in the Al grains, measured at room temperature, closely follows the solubility at the anneal temperature when a high cooling rate is used from the annealing temperature. With fine lines, the room temperature Cu concentration follows the solubility at the anneal temperature only at low anneal temperatures.