William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
In this article, the authors present an overview of the latest enhancements in the next version of the SQL standard (SQL:2003) as well as a brief summary of the existing functionality in the current version (SQL:1999) and previous versions. Additionally, selected parts are presented in more detail. The article concludes with an outlook on the future of the SQL standard.