David L. Harame, Johannes M.C. Stork, et al.
IEEE Electron Device Letters
Metal stoichiometry in superconducting bulk materials and thin films made of LaSrCu-oxides, YBaCu-oxides, and BiCaSrCu-oxides were determined by inductively coupled plasma atomic-emission spectrometry (ICP-AES) after dissolution in a 1:1 mixture of 20% v/v hydrochloric and nitric acids. The method provides reliable results, with which a variety of manufacturing processes can be optimized. The precision of the metal determinations ranges from 3 to 9%. © 1987.