Conference paper
63-75 GHz fT SiGe-base heterojunction bipolar technology
G.L. Patton, J.H. Comfort, et al.
VLSI Technology 1990
Metal stoichiometry in superconducting bulk materials and thin films made of LaSrCu-oxides, YBaCu-oxides, and BiCaSrCu-oxides were determined by inductively coupled plasma atomic-emission spectrometry (ICP-AES) after dissolution in a 1:1 mixture of 20% v/v hydrochloric and nitric acids. The method provides reliable results, with which a variety of manufacturing processes can be optimized. The precision of the metal determinations ranges from 3 to 9%. © 1987.
G.L. Patton, J.H. Comfort, et al.
VLSI Technology 1990
M.W. Shafer, T. Penney, et al.
Physical Review B
M.S. Goorsky, T.F. Kuech, et al.
Applied Physics Letters
T.S. Plaskett, S.A. Shivashankar, et al.
Journal of Applied Physics