PublicationDRC 1994Conference paperDegradation of thin SiO 2 gate oxides by atomic hydrogenDRC 1994View publicationAbstractNo abstract available.Home↳ PublicationsDate20 Jun 1994PublicationDRC 1994AuthorsF. CartierD.J. DiMariaD.A. BuchananJ.H. StathisW.W. AbadeerR.-P. VollertsenIBM-affiliated at time of publicationShare