Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A model for channels in which an input sequence can produce output sequences of varying length is described. An efficient computational procedure for calculating Pr {Y|X} is devised, where X = Xt, X2,” • ‘,XM and Y = Yt, Y2,” • ·’YN are the input and output of the channel. A stack decoding algorithm for decoding on such channels is presented. The appropriate likelihood function is derived. Channels with memory are considered. Some applications to speech and character recognition are discussed. © 1975, IEEE. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Alfonso P. Cardenas, Larry F. Bowman, et al.
ACM Annual Conference 1975
Beomseok Nam, Henrique Andrade, et al.
ACM/IEEE SC 2006
Maurice Hanan, Peter K. Wolff, et al.
DAC 1976