PaperLarge-field particle beam optics for projection and proximity printing and for maskless lithographyHans Loeschner, Gerhard Stengl, et al.Journal of Microlithography, Microfabrication and Microsystems
Conference paperA NOVEL DUAL-AXIAL AFM CANTILEVER WITH INDEPENDENT PIEZORESISTIVE SENSORS FOR SIMULTANEOUS DETECTION OF LATERAL AND VERTICAL FORCESBenjamin W. Chui, Thomas W. Kenny, et al.IMECE 1997
PaperPatterned Perpendicular and Longitudinal Media: A Magnetic Recording StudyManfred Albrecht, Srikanth Ganesan, et al.IEEE Transactions on Magnetics
PaperA novel dual-axial AFM cantilever with independent piezoresistive sensors for simultaneous detection of lateral and vertical forcesBenjamin W. Chui, Thomas W. Kenny, et al.IMECE 1997