Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
For ferroelectric quantum-limit investigations, KTa1-xNbxO3 solid solutions with low Nb concentrations are of current interest. Large crystals (25×25×12 mm3) have been grown by a slow-cooling method using the accelerated crucible rotation technique ACRT. The experiments are described in some detail, and the experimental parameters related to the various types of inhomogeneity observed in such solid solutions. Moreover, the concentration gradient and the striations have been investigated by acoustic resonance and electron-microprobe measurements. Very faint striations may still exist in the crystals obtained as indicated by weak strain patterns in polarized light. These striations have been minimized in the ACRT experiments. © 1982.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Arvind Kumar, Jeffrey J. Welser, et al.
MRS Spring 2000
Xikun Hu, Wenlin Liu, et al.
IEEE J-STARS
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009