Daniel J. Coady, Amanda C. Engler, et al.
ACS Macro Letters
Daniel J. Coady, Amanda C. Engler, et al.
ACS Macro Letters
R.M. Macfarlane, R.L. Cone
Physical Review B - CMMP
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Ming L. Yu
Physical Review B