Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The critical behavior of the three-state Potts model in two dimensions is investigated with the use of the Monte Carlo renormalization group (MCRG), and the results are compared with conjectured values as well as with other methods. Recent advances in the MCRG enable greatly improved convergence, as well as greater insight into the structure of the renormalization transformation. The introduction of a four-point interaction is used to control the chemical potential of effective vacancies in a purely Potts Hamiltonian. © 1983 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
S. Cohen, J.C. Liu, et al.
MRS Spring Meeting 1999
J.R. Thompson, Yang Ren Sun, et al.
Physica A: Statistical Mechanics and its Applications
M.A. Lutz, R.M. Feenstra, et al.
Surface Science