Conference paper
Optimization of real phase-mask performance
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
No abstract available.
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
M.B. Small, R.M. Potemski
Proceedings of SPIE 1989
A. Grill, B.S. Meyerson, et al.
Proceedings of SPIE 1989
Arnon Amir, Michael Lindenbaum
IEEE Transactions on Pattern Analysis and Machine Intelligence