Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Dynamic force microscopy has proved to be a powerful imaging tool. Here, the tip of an atomic force microscope is vibrated at a high frequency, typically the resonance frequency of the lever sensor, and at a large vibration amplitude, typically of the order of 10 nm. Imaging contrast is obtained from measuring shifts of the resonance frequency, which provides information on conservative interactions, and of the Q-factor, which is sensitive to dissipative interactions. Problems associated with interaction sensing are discussed from a theoretical and an experimental point of view.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
C.M. Brown, L. Cristofolini, et al.
Chemistry of Materials
Lawrence Suchow, Norman R. Stemple
JES
Arvind Kumar, Jeffrey J. Welser, et al.
MRS Spring 2000