Computer simulation of microclusters, surfaces, and interfaces

Imran Nasim, Melanie Weber

SCML 2024

E. Babich, J. Paraszczak, et al.

Microelectronic Engineering

Joy Y. Cheng, Daniel P. Sanders, et al.

SPIE Advanced Lithography 2008

Dipanjan Gope, Albert E. Ruehli, et al.

IEEE T-MTT